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BS EN 60749-28:2017 Semiconductor devices. Mechanical and climatic test methods - Electrostatic discharge (ESD) sensitivity testing. Charged device model (CDM). Device level, 2017
- National foreword
- CONTENTS
- Figures
- FOREWORD
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Required equipment [Go to Page]
- 4.1 CDM ESD tester [Go to Page]
- 4.1.1 General
- 4.1.2 Current-sensing element
- 4.1.3 Ground plane
- 4.1.4 Field plate/field plate dielectric layer
- Figure 1 – Simplified CDM tester hardware schematic [Go to Page]
- 4.1.5 Charging resistor
- 4.2 Waveform measurement equipment [Go to Page]
- 4.2.1 General
- 4.2.2 Cable assemblies
- 4.2.3 Equipment for high-bandwidth waveform measurement
- 4.2.4 Equipment for 1,0 GHz waveform measurement
- 4.3 Verification modules (metal discs)
- 4.4 Capacitance meter
- 4.5 Ohmmeter
- 5 Periodic tester qualification, waveform records, and waveform verification requirements [Go to Page]
- 5.1 Overview of required CDM tester evaluations
- 5.2 Waveform capture hardware
- 5.3 Waveform capture setup
- 5.4 Waveform capture procedure
- 5.5 CDM tester qualification/requalification procedure [Go to Page]
- 5.5.1 CDM tester qualification/requalification procedure
- 5.5.2 Conditions requiring CDM tester qualification/requalification
- 5.5.3 1 GHz oscilloscope correlation with high bandwidth oscilloscope
- 5.6 CDM tester quarterly and routine waveform verification procedure [Go to Page]
- 5.6.1 Quarterly waveform verification procedure
- 5.6.2 Routine waveform verification procedure
- 5.7 Waveform characteristics
- Tables [Go to Page]
- Table 1 – CDM waveform characteristics for a 1 GHz bandwidth oscilloscope
- Table 2 – CDM waveform characteristics for a high-bandwidth (≥ 6 GHz) oscilloscope
- 5.8 Documentation
- 5.9 Procedure for evaluating full CDM tester charging of a device
- Figure 2 – CDM characteristic waveform and parameters
- 6 CDM ESD testing requirements and procedures [Go to Page]
- 6.1 Device handling
- 6.2 Test requirements [Go to Page]
- 6.2.1 Test temperature and humidity
- 6.2.2 Device test
- 6.3 Test procedures
- 6.4 CDM test recording / reporting guidelines
- 7 CDM classification criteria [Go to Page]
- Table 3 – CDM ESDS device classification levels
- Annex A (normative)Verification module (metal disc) specifications and cleaning guidelinesfor verification modules and testers [Go to Page]
- A.1 Tester verification modules and field plate dielectric
- A.2 Care of verification modules
- Table A.1 – Specification for CDM tester verification modules (metal discs)
- Annex B (normative)Capacitance measurement of verification modules (metal discs)sitting on a tester field plate dielectric
- Annex C (informative)CDM test hardware and metrology improvements
- Annex D (informative)CDM tester electrical schematic [Go to Page]
- Figure D.1 – Simplified CDM tester electrical schematic
- Annex E (informative)Sample oscilloscope setup and waveform [Go to Page]
- E.1 General
- E.2 Settings for the 1 GHz bandwidth oscilloscope
- E.3 Settings for the high-bandwidth oscilloscope
- E.4 Setup
- E.5 Sample waveforms from a 1 GHz oscilloscope
- E.6 Sample waveforms from an 8 GHz oscilloscope
- Figure E.1 – 1 GHz TC 500, small verification module
- Figure E.2 – 1 GHz TC 500, large verification module
- Figure E.3 – 8 GHz TC 500, small verification module (oscilloscope adjusts for attenuation)
- Figure E.4 – GHz TC 500, large verification module(oscilloscope adjusts for attenuation)
- Annex F (informative)Field-induced CDM tester discharge procedures [Go to Page]
- F.1 General
- F.2 Single discharge procedure
- F.3 Dual discharge procedure
- Figure F.1 – Single discharge procedure (field charging, ICDM Pulse, and slow discharge)
- Figure F.2 – Dual discharge procedure (field charging, 1st ICDM pulse, no field, 2nd ICDM pulse)
- Annex G (informative)Waveform verification procedures [Go to Page]
- G.1 Factor/offset adjustment method
- Figure G.1 – An example of a waveform verification flow for qualification and quarterly checks using the factor/offset adjustment method
- Figure G.2 – An example of a waveform verification flow for the routine checksusing the factor/offset adjustment method
- G.2 Software voltage adjustment method
- Figure G.3 – Example of average Ipeak for the large verification module – high bandwidth oscilloscope
- Figure G.4 – An example of a waveform verification flow for qualification and quarterly checks using the software voltage adjustment method
- G.3 Example parameter recording tables
- Figure G.5 – An example of a waveform verification flow for the routinechecks using the software voltage adjustment method
- Table G.1 – Example waveform parameter recording table for the factor/offset adjustment method
- Table G.2 – Example waveform parameter recording table for the software voltage adjustment method
- Annex H (informative)Determining the appropriate charge delay for full charging of a large module or device [Go to Page]
- H.1 General
- H.2 Procedure for charge delay determination
- Figure H.1 – An example characterization of charge delay vs. Ip
- Annex I (informative)Electrostatic discharge (ESD) sensitivity testing directcontact charged device model (DC-CDM) [Go to Page]
- I.1 General
- I.2 Standard test module
- I.3 Test equipment (CDM simulator) [Go to Page]
- I.3.1 Test equipment design
- I.3.2 DUT (device under test) support
- Table I.1 – Dimensions of the standard test modules [Go to Page]
- I.3.3 Metal bar/board
- I.3.4 Equipment setup
- I.4 Verification of test equipment [Go to Page]
- I.4.1 General description of verification test equipment
- Figure I.1 – Examples of discharge circuit wherethe discharge is caused by closing the switch
- Figure I.2 – Verification test equipment for measuring the discharge current flowingto the metal bar/board from the standard test module
- Figure I.3 – Current waveform
- Table I.2 – Specified current waveform [Go to Page]
- I.4.2 Instruments for measurement
- I.4.3 Verification of test equipment, using a current probe
- Figure I.4 – Measurement circuit for verification method using a current probe
- Table I.3 – Range of peak current Ip1 for test equipment
- I.5 Test procedure [Go to Page]
- I.5.1 Initial measurement
- I.5.2 Tests
- Table I.4 – Specification of peak current Ip1 for the current probe verification method [Go to Page]
- I.5.3 Intermediate and final measurement
- I.6 Failure criteria
- I.7 Classification criteria
- I.8 Summary
- Bibliography [Go to Page]